MBE liquid nitrogen circulation and multi-wafer systems
lmillerturchette2023-05-10T16:06:40+00:00Molecular beam epitaxy (MBE) is an epitaxial deposition technique which consists of growing layers of atomically thin materials onto a substrate. The MBE process takes place inside an ultra-high vacuum chamber to make materials with high purity and precision. To achieve such low pressures, liquid nitrogen (LN₂) cryoshrouds are used to pump out residual gases.